Until 1995 you had flying service between every stage, or even during the stage. Helicopter service was banned in 1986, and mid-stage tyre changes were banned in 1988. In 1995 that service parks came, but there were many of them, typically between 30-50 km of stages. From 2001 or so it's been mostly single service park location. Super rally was introduced in 2005. There were still usually two visits to the service park during a day. Around 2010 this started changing towards only one midday service during the rally day (in addition to morning and evening).
The first superrally was arranged in 1999 along the first power stages (aka TV stage). Crews who had retired were allowed to take part in the TV stage and score additional points.